deep trench isolation process
由ZKuiying著作·2010·被引用5次—Adeeptrenchisolationprocessprovidesverylowleakagecurrent,low...Accordingtotheoptimizedtrenchprocess,desirableisolationcapabilityofthedeep ...,ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhig...
Method for Forming Deep Trench Isolation Structure for CMOS ...
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2023年12月16日—Themethodbeginsbyformingatrenchinasemiconductorsubstrate,extendingfromonesidetotheother.Thetrenchhasanopeningononeside, ...
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